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– Direct upgrade path from 635/SL – Dual load ports with two 37 inch domes accommodate 50 x 150mm wafers – Additional dedicated cryopump for second chamber – Avail in right-hand, left-hand & in-line configurations for installation flexibility – Software-enabled lockout feature allows dual lock system to operate in single lock mode for maintenance |
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| ©Copyright 2006 CHA Industries | ||