– Direct upgrade path from 635/SL or 635/DL
– AGV–compliant fully automated cassette-to-cassette operation
– Up to 100 starts per hour with 150mm wafers
– Wafer handling via industry standard 6-axis robot
– Integral class 10 mini-environment with laminar flow
– System approach keeps robotic components out of high vacuum to lower costs and improve reliability
– Proven handling components minimize risk while maximizing uptime
Detail Photos

635/SL Module

635/DL Module

635/RL Module

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