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Adjustable Angle Planetary Fixturing (AAPF) is specifically designed for applications that require extreme uniformity of deposition. The AAPF design allows the operator to tailor the angle which will maximize uniformity in step coverage or lift-off processes. The capability of selecting the best angle of incidence ensures precise control and uniformity on all types of substrates. Adjustable angle allows operator to maximize step coverage and uniformity.

Additional Features

Adjustable Angle
Additional Features

- Excellent uniformity.
- Individual substrate holders for ease of handling.
- Precise multi-planet substrate carrier.
- All stainless steel construction.
- Instant interchangeability of substrate size.
- Custom substrate holders to meet any customer requirements.
- Rotating assembly easily removable for cleaning.
- May be used with multiple sources.
- Precise control of film uniformity +/- 1% is achievable.
- Smooth, vibration-free rotation.
- Specialized fixturing available.
- Chip holders for irregular shaped substrates.

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This alternative planetary fixturing from CHA features substrate holders/domes that do not rest upon or move on a rigid track or ring.

CHA’s patented series of rotary, 3-dome planetary fixturing accommodate virtually any shape or size of wafer to provide higher yields and increase throughput. By applying Knudsen’s cosine distribution law, CHA’s fixturing continuously changes each wafer’s aspect to the evaporant stream. This ensures excellent coverage over the step, with uniformities of ±5% or better.

Additional Features

- high rotation speeds of up to 150 RPM on water-cooled ring and track assembly
- quick and easy planet removal with no tools or hardware
- machine-gauged 304 stainless steel construction maintains shape under the most stringent heat and handling conditions.

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CHA’s Flat Plate Planetary fixturing may be mounted in either a horizontal or vertical orientation and used for evaporation or sputtering applications. It can increase the versatility of thin film deposition systems that require the coating of unusual shapes and sizes of substrates. The all stainless-steel design provides epicyclical motion to optimize film uniformity and coverage.

In addition to this Flat Plate fixturing, CHA offers dome style substrate holders. The fixturing is available as Static, with no movement of substrate holders, or with various types of motion.

CHA’s Caroussel lift-off dome models are designed for handling small substrates and for small volume batches.

CHA’s Suspended lift-off dome models are designed for handling large substrates and for large volume batches.

This Flip Fixturing from CHA is designed for applications that require coating of more than a single side or surface of substrates without having to vent the vacuum between when changing sides or presentation. Flip Fixturing comes in several different models and sizes to accommodate various presentation requirements.