Process Station	Output	Power Supply	Output
Sputter Cathode	20KW	MDX-10	10KW
Electron Beam Gun	8KW	SR10-111	10KW
Thermal Source Holder	10KW	SR10-111	10KW
Heater Array	4KW	HPS12-HP	12KW
Linear Ion Beam Gun	1500V@200 MA	MPS-5001	2000V@300MA
Plasma Process Bar	2KW	HV8000	2000V@200MA

The entire air-to-air deposition process can be automatically controlled by an optional CHA One Button Controller or by CHA’s Siemen’s-based PLC/PC automation. The control systems permit one-button, fully automatic cycling as well as providing multi-function, semi-automatic control for development and maintenance-type functions. Separate process and source control modules are mounted in electronic rack assemblies located in proximity to the deposition chamber. This allows adjustments to be made as the process is observed.

The PLC/PC based systems automatically control each step in the air-to-air process as well as providing a real-time interactive flat panel display of system and status. DDE (Dynamic Data Exchange) is utilized between the controller and the flat panel display.

Visual and audio “pop up” screens keep the operator aware of faults and include displays of suggested corrective action.
The PC-based computer employs the very popular Windows®, Wonder Ware/In Touch®, and Wedge® software, making operation of these systems extremely user friendly.

A bar code scanner for data entry and tracking or data logging is available. Stored data is easily called up and displayed in a spreadsheet format. Programming data is entered from a disk, slide out keyboard, mouse, or screen function keys. Operation and programming access levels are controlled by security codes.

The Fixture drive system is computer controlled and operates independently of the process system. The operator interface with this system is via a touch screen. Control of the digital drive system for loading, run preparation, and unloading is controlled from either the front or rear touch screen panels.

The Fixture is mounted on the rear door of the chamber. True-trammed vacuum compatible roll components are rigidly supported at both ends for precision alignment and stability. These feed the substrate material and regulate its temperature as it passes the various Stations.

Drum temperature is adjusted by a water chiller, which regulates heat transfer between the drum and the substrate material.

A photo-electric sensed edge guide system prevents “wander” and “telescoping” of substrate material. Idler rolls allow for “over winding” and “under winding” of the material on the substrate cores.

The nip roll prevents substrate material slippage as it rides around the temperature controlled Processing Drum. Two tension rolls with load cells, using advanced strain gauge technology, control two tension zones at each winder and unwinder roll drive shaft. The load cells output is sensed by the computer and controls web tension by controlling the winder and unwinder roll speed and torque. A quarter turn of the core chuck head attaches the substrate core to the winder or unwinder drive shaft.

On the atmosphere side of the rear door, the Web/Roll Fixture uses a unique, dual speed three motor drive system. Brushless Servo Motors have integrally mounted digital encoders and speed reducers. Web tension is measured by transducers using a dual calibration range amplifier. The central Processing Drum drive provides primary speed control. This drive system allows the Web/Roll fixture to accept almost any substrate material, which is stored on rolls and process it roll-to-roll. The systems’ 2,000-to-1 turndown ratio with 0.1% of set point speed control allows for extreme flexibility. Foils from 9 microns to 2 thousandths of an inch have been run through the full speed range wrinkle free. Non-metallic materials such as Mylar, polyester, kapton, and other plastics have also been run through the full speed range wrinkle free. With the fixture illustrated, it can accommodate rolls up to 14 inches wide with a 2,500-foot average web length.

The fixture is easily inserted and removed from the chamber with the aid of a fully supportive, double-beam overhead trolley for easy roll loading. Overhead design allows for an obstruction free floor, increases productivity by reducing roll handling time and service, and plant safety is improved by eliminating common obstructions from the immediate work area.