The chamber incorporates a unique, patented slide-down door on the front of the chamber to minimize floor space requirements while providing ease of access. A rear opening-rolling door permits insertion and removal of the Web/Roll Fixture. The two doors permit total access to sources, shutters, shielding, and other fixturing components so they may be easily serviced. Front and side view ports allow the operator to observe the process and the Web/Roll components.

The Cryo Coil provides 50,000 L/Sec. pumping speed for water vapor and other condensable gases in the Process Chamber.

General Drive Specifications
Line Speed
(High Range)    (Low Range)	1 to 200 FPM 0.1 to 20 FPM
Speed Accuracy	±0.1% of set point for either range
Acceleration	20 Seconds to max. machine speed
Tension
(High Range)    (Low Range)	7 to 70 Pounds 3.5 to 25 Pounds
Tension Accuracy
(High Range)    (Low Range)	±5% of set point ±10% of set point
Tension Taper	Adjustable 0-50%
Core Diameter	3" Inside Diameter
Full Roll Diameter	7" max. Outside Diameter
Material Thickness	Unknown
Web Width	14 Inches
Web Process Width	13 Inches
Finished Web Width	12+ Inches

The Web/Roll Coater utilizes CHA’s expanded 16 inch patented Pumping Stack. The Pumping Stack combines four components, which are mounted to maximize conductance, which maximizes pumping speed. This pumping stack has four times the inlet port speed of individually mounted components and uses 75% less space with 1/3 the number of major vacuum to air seals. The simple elegance of CHA’s 16-inch stainless steel High Vacuum valve has the least moving parts of any valve in the industry and its vertical sealing plane eliminates high vacuum leaks caused by falling particles—a common problem with horizontal gate and other types of poppet valves. (Pumping options include diffusion, cryo, or turbo pumps.)

A 50 cfm Mechanical Pump is provided for roughing the Process Chamber and backing the High Vacuum Pumping Stack components. Mechanical Pumps with higher cfm ratings are available.

Pumps, pump fluids, and filters are provided for corrosive gases if required by process parameters.

The CHA Web/Roll Coater yields consistently high film uniformity from run-to-run. A computer-directed web drive system and the consistent operation of Process Stations allow for excellent run to run process cycles.

CHA can provide a complete range of deposition sources including Electron Beam Guns, Ion Beam Guns, Thermal Sources, and Sputtering Cathodes together with associated Heater Arrays, Shields, and Shutters. Systems can be furnished with Cryo Coil Assembly, Molecular Sieve Trap, and Liquid Nitrogen Level Control as well as hardware options such as Feedthroughs, Gauges, and Flow Controls.

The Web/Roll Coating System is designed to be either free standing or for through the wall mounting to meet cleanroom requirements and conserve valuable cleanroom space. Both front and/or back door of the high vacuum chamber can be placed inside a cleanroom. This allows for loading and unloading of substrate materials from the rear as well as access to sources and fixturing from the front and rear. The pumping stack and other associated equipment are easily accessible outside of the clean room for maintenance.

CHA’s Production Box Coaters also except Web/Roll Fixtures for large volume precision coating of a wide variety of roll materials. The unit can be furnished with single or dual pumping stacks. The typical 5' x 5' x 5' Box Chamber is provided with multiple access and viewing ports. The Box Chamber also incorporates full width doors on both ends for loading and unloading substrate materials. CHA also offers various sized high vacuum deposition chambers in round, rectangular, and square shapes to accommodate a wide range of process requirements.