CHA power supplies meet international safety requirements and are compatible with most thermal sources and high vacuum deposition systems.
SR-Series Electron Beam Power Supplies
CHA's SR-Series of Electron Beam Power Supplies is comprised of various models that provide a maximum, reliable power output ranging from 3kW on up to 15kW. These power supplies can simultaneously operate up to three electron beam sources, with three sources in a single chamber or one source in each of three chambers. Three output ranges (low, medium, high) provide tight control over emission current, which limits drift to ±2% of the selected range and regulates the film rate (so critical for low-power and multiple film applications).
Heater Power Supplies
CHA's compact yet powerful Heater Power Supplies provide up to 16kW of SCR controlled power for heat sources such as quartz lamps or any other resistive-type heater assembly. At 5" x 9" x 17" in size, the HPS is designed for standard half-panel mounting to conserve panel area space, and incorporate a variety of features to ensure safe, precise and reliable operation. Such features include a digital temperature controller that provides adjustable process temperature, set point and control settings; 24 kW fan-cooled SCRs to accommodate overloads and shorts; a safety interlock, auto/off/manual switch, soft-start and power breaker.
Resistance Power Supplies
CHA's Resistance Power Supplies come available with 2000 Watt and 5000 Watt outputs to supply single or dual thermal deposition sources; and feature large, easily readable displays that show voltage and current data. Available in either rack-mountable and console configurations, these RPS Power Supplies meet all international safety requirements and are compatible with most thermal sources and high vacuum deposition systems.