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CHA's SR-Series Electron Beam Power Supplies feature superior emission current regulation, unique gun-programming capabilities, and durability. Models provide five different outputs-3-4-6-10-15 KW. The output power may be used to supply a single EB Source, simultaneously power three sources in a single chamber, or independently operate a source in each of three chambers. Power supplies are also available for Sputtering, 1-3-5-15-30 KW; Heater, 6-10-16 KW; and Thermal deposition, 1-5-10 KW.
Click thumbnails for more info |
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Resistance Power Supplies
CHA’s Resistance Power Supplies come available with 2000 Watt and 5000 Watt outputs to supply single or dual thermal deposition sources; and feature large, easily readable displays that show voltage and current data. Available in either rack-mountable and console configurations, these RPS meet all international safety requirements and are compatible with most thermal sources and high vacuum deposition systems. |
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Heater Power Supplies
CHA’s compact yet powerful Heater Power Supplies provide up to 16kW of SCR controlled power for heat sources such as quartz lamps or any other resistive-type heater assembly. At 5” x 9” x 17” in size, the HPS is designed for standard half-panel mounting to conserve panel area space, and incorporate a variety of features to ensure safe, precise and reliable operation. Such features include a digital temperature controller that provides adjustable process temperature, set point and control settings; 24 kW fan-cooled SCRs to accommodate overloads and shorts; a safety interlock, auto/off/manual switch, soft-start and power breaker. |
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SR-Series Electron Beam Power Supplies
CHA’s SR-Series of Electron Beam Power Supplies is comprised of various models that provide a maximum, reliable power output ranging from 3kW on up to 15kW. These power supplies can simultaneously operate up to three electron beam sources, with three sources in a single chamber or one source in each of three chambers. Three output ranges (low, medium, high) provide tight control over emission current, which limits drift to ±2% of the selected range and regulates the film rate (so critical for low-power and multiple film applications). |
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SR-Series Electron Beam Power Supplies
Fully compatible with existing equipment, the SR Series also features reliable triode tube for precise voltage regulation and instantaneous arc-down recovery, adjustable output voltage of -1kV to -10kV, forced air-cooling, interlocked design for operator and equipment safety and international safety compliance. SR-3: 3kW maximum power, 22”W x 26”D x 50”H |
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