CHA Industries - Spare Parts

Spare Parts

Mark 40/50 Type Systems Miscellaneous Spare Parts


ITEM	QTY	U/M	P/N	DESCRIPTION

	1	kit	5-V-40	Complete O-ring kit. (Mark 40, D.P. System)
	1	kit	5-VC-40	Complete O-ring kit. (Mark 40, Cryo System)
	1	kit	5-V-50	Complete O-ring kit (Mark 50, D.P. System)
	1	kit	5-VC-50	Complete O-ring kit. (Mark 50, Cryo System)
	1	ea.	6041	Roughing port screen (for block valve)
	1	ea.	83453	Solenoid Valve - block valve, relay logic
	1	ea.	83453-24VAC	Solenoid Valve - block valve, PC/PLC
	1	ea.	6113M4B	Ball Check Valve
	1	ea.	B1GS4	Toggle Valve
	1	ea.	8262B210LT	Solenoid Valve, LN2
	1	ea.	02X2	LN2 Heater Cartridge
	2	ea.	IG100N	Ion Gauge Tube, Nonex tubulation
	2	ea.	275-071	Convectron Gauge Tube
	1	ea.	DV-6M	Thermocouple Gauge Tube (Cryo pumped system)
	1	ea.	P11031W3AX7657	Pressure switch
	1	ea.	P02900-1	Vacuum Sensor Assy (replaces 5898 Snap Switch sensor)
	7	ea.	312135T	Light/Lens assembly for Auto Tech IIC. (Include 1 of each of the the following engraved lenses: "Manual", "Off", "Roughing", "Automatic", "Standby", "Hi-Vac", & "Vent".)
	5	box	008010G10	Quartz crystals, sensor head. (10/box)
	4	ea.	6230-21	O-ring, view port
	3	ea.	5738-6	Pyrex view port (with o-rings)
	1	ea.	5890-11	Mirror Array
	2	ea.	6066	Rear wire mirror hanger
	1	ea.	6738-47-3	Chamber door micro switch
	1	ea.	5538-1&2	6 inch shutter blade set (1 pkt/res)
	1	ea.	6687-4&5	8 inch shutter blade set (Temescal EB)
	1	ea.	8933-1&2	8 inch shutter blade set. (CHA EB)
	1	ea.	12839-1	Flag Shutter Blade
	1	gal.	AW32	Hydraulic Fluid, 1 Gallon
	2	btl.	DC704-500CC	Diffusion pump fluid, 500cc
	1	gal.	1407K-1GAL	Mechanical pump fluid, 1 gallon
	1	ea.	13X	Sieve material, 1 pint (for CHA sieve traps)
	1	kit	EF75-054HD-99	Heavy Duty Offset Drive Assembly Rebuild Kit
	2	ea.	6262-32	MK50 Door Gasket
	2	ea.	6262-25	MK40 Door Gasket
	1	ea.	6515	MK40/50 Valve body gasket

Mark 40/50 Type Systems Rebuild Kits

ITEM	QTY	U/M	P/N	DESCRIPTION
	1	kit	6532-99	Mark 40/50 Hi-Vac Valve Rebuild Kit consisting of the following:
	2		2-385	16" gate o-ring
	3		6227-19	Actuator shaft seal
	1		6230-14	Cylinder to shaft seal
	1		732CAV312	"CAV" cup packing
	1		2500x3000	Poly pack seal
	1		6514-6	Actuator shaft bushing, Teflon
	1		MAV-2C	Cartridge valve
	1		D39	Dowel Pin
	1	kit	5288-99	Roughing and Foreline Block Valve Components consisting of the following:
	2		CB-28218	Piston cup
	2		5288-4	Gate
	2		5288-5	Actuator Shaft
	2		4496-P1	Plate, end actuator
	2		N5000225H	Retaining ring
	2		6186	Lock pin gate
	2		6230-4	O-ring end plate
	4		6227-10	O-Ring shaft
	6		6230-16	O-ring Body
	2		6230-12	O-ring Gate
	2		7100-3/8	Stato seal

Mark 40/50 Type Systems Fixturing

ITEM	QTY	U/M	P/N	DESCRIPTION
Heavy Duty Offset Drive spare parts (EF75-054HD):
	1	ea.	VB20002500250	Ball bearing
	1	ea.	VB20002625312	Ball bearing
	3	ea.	VS200S	Retaining Ring
	1	ea.	VH262S	Retaining Ring
	1	ea.	VBDD375875281B	Ball bearing
	1	ea.	B98	Needle bearing
	1	ea.	IR68	Inner Race
	1	ea.	6511-5	Drive Shaft
	3	ea.	6227-19	O-ring
	2	ea.	6227-8	O-ring
				Lift-Off Dome:
	4	ea.	VBDD375875281F	Ball Bearing
	8	ea.	5100-37H	Retaining Ring

Offset Drive spare parts (EF75-054):
	1	ea.	6511-5	Drive Shaft
	1	ea.	B98	Needle Bearing
	1	ea.	IR68	Inner race
	3	ea.	6227-19	O-ring, drive shaft
	2	ea.	6227-8	O-ring, drive housing
	2	ea.	VBDD15622000281250	Ball bearing, drive gear
	1	ea.	VBDD375875281B	Ball bearing, drive housing

Planetary Domes:
	6	ea.	VBDD375875281F	Ball bearing, drive housing
	3	ea.	6681-7	Dome Hanger (031 model/size)
	3	ea.	6344-9	Dome hanger (041 model/size)
	3	ea.	6509	Dome hanger (051 model/size)
	3	ea.	6709	U-clip (1 each, per dome hanger arm)
	100	ea.	8818	Retaining clip (Back-loading Swivel Clip Style)
	100	ea.	C0210-022-0310S	Compression spring (Back-loading Swivel Clip Style)
	100	ea.	5555-12H	Grip ring (Back-loading Swivel Clip Style)
	100	ea.	5827	CHA Coil spring clip. (Front Loading spring clip style)(For substrates 0 to .045 thick)
	100	ea.	6359	CHA Extended Coil Spring Clip. (Front Loading spring clip style) (For substrates .045 to .150 thick)


CHA News & Events	CHA Careers	CHA Specials
• New Mark 40 Web Roll Coater • New Addition to The CHA Family • CHA at Semicon West 2013	Consider a career with the company that invented the Mark 50 and Planetary Fixturing. Check often for available opportunities.	Always check for special deals on a wide range of CHA technology, from systems to components. These deals are available for a limited time only, subject to stock on hand.

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sales@chaindustries.com|fieldservice@chaindustries.com|Tel: (510) 683-8554|Fax: (510) 683-3848