Targeting R+D, Pilot Line Production and university requirements, the new Criterion system offers midrange sizing incorporating both load lock and source isolation options. The Criterion Systems feature a hinged, water-cooled front door and a new frame design. The new chamber design will accommodate many tooling configurations and a variety of deposition sources and combinations of sources. Control is achieved via a touch screen PC/PLC.
CHA Solution R+D/Pilot Line Production System currently configured for thermal evaporation using Knudsen type planetary. Available “as is” or can be configured to meet your application requirements.
CHA SE 600 Bell Jar Evaporation System for Production, R&D and University applications currently configured with multi-pocket electron beam source. This system is equipped with CHA’s Flip Fixturing designed for dual face deposition schemes. The system is available “as is” or can be configured to meet your application requirements.